Full Description

Design of clean spaces or cleanrooms covers much more than traditional temperature and humidity control. Other factors may include control of particle, microbial, electrostatic discharge (ESD), molecular, and gaseous contamination; airflow pattern control; pressurization; sound and vibration control; life safety; industrial engineering aspects; and manufacturing equipment layout. The objective of good cleanroom design is to control these variables while optimizing installation and operating costs.

Chapter Table of Contents

Terminology

Clean Spaces and Cleanroom Applications

Airborne Particles and Particle Control

Air Pattern Control

Airflow Direction Control Between Clean Spaces

Testing Clean Air and Clean Spaces

Pharmaceutical and Biomanufacturing Clean Spaces

Start-Up and Qualification of Pharmaceutical Cleanrooms

Semiconductor Cleanrooms

High-Bay Cleanrooms

Environmental Systems

Sustainability and Energy Conservation in Cleanrooms

Noise and Vibration Control

Room Construction and Operation

Cleanroom Installation and Test Procedures

Integration of Cleanroom Design and Construction

Keywords: data centers, data processing

Citation: 2011 ASHRAE Handbook -- HVAC Applications:Chapter 19, Data Processing and Electronic Office Areas